silicon pressure sensor

Descriptions Based on piezoresistive silicon technology, UPX6-a, -b, and -c are manufactured from piezoresistive silicon dies. UPX6-c silicon piezoresistive pressure sensor is manufactured by using UPX-19's manufacturing techniques. Features *Computer tested, laser trimming compensation *Good performance, high reliability *Imported pressure silicon dies *Isolated-type structure, suitable for many kinds of medium measurement Specifications pressure mediumgas or liquids ompatible to stainless steelpressure ranges-1 0,...0 600 bar (G, A, S) pressure typegauge (G), absolute (A), sealed gauge (S)overload pressure150%FSoutput signal≥70mV (typical)accuracy0.25%FS (standard), 0.5%FS zero offset≤±2mVlong term stability<0.2%FS/yearexcitation1.5mAcompensated temperature range 0 +70°coperating temperature range-20 +80°cstorage temperature range-40 +100°ctemperature coefficient of zero0.2%FS/10°ctemperature coefficient of span0.2%FS/10°cinput/output resistance2 6kΩinsulation resistance100MΩ @ 50VDCresponse time (10% 90%)≤1mselectrical connection6-pin or 4-wirematerial of pressure membrane316Lmaterial of housing316sealingfluoro-rubber sealing ringfilled oilolive oilwiregold-plated kovar pins, or silicon rubber shielded flexible wiresvibration20g/ (20 5000Hz)net weight23gservice life>1x108 times